Method for pretreatment of silicon sample, method for evaluating metal contamination of silicon sample, method for evaluating single crystal silicon ingot growth process, method for producing single crystal silicon ingot and method for manufacturing silicon wafer

摘要

Problem to be solved: to provide a new pretreatment method for silicon samples before evaluation of metal contamination.The silicon sample before the metal contamination evaluation is acid etched by an etching liquid containing hydrogen fluoride and nitric acid, and the silicon sample after the acid etching is SC1 washed by the SC1 cleaning liquid having a liquid temperature of 80 ° C. or less A pretreatment method of a silicon sample in which the metal contamination including the acid washing of the silicon sample is performed.No selection