High-precision and quick chip pickup / mounting device and chip mounting machine using it

摘要

PROBLEM TO BE SOLVED: To provide a highly accurate and rapid chip pickup / mounting device. A pickup / mounting device includes a wafer stage for mounting a wafer 1 and a chip support 6 for mounting a chip mounting substrate 7, and the wafer stage and the chip support 6 are provided with each other. A rotary drive device is provided at the central position, and a rotary tower is connected to the rotary drive device to drive the rotary tower so as to realize rotation of 360 ° in the horizontal direction. In the direction, at least three suction nozzles for taking out and placing the chip 3 on the wafer 1 are arranged at equal intervals, and a vertical motion driving device for driving the suction nozzles so as to move up and down in the vertical direction is provided. Has been done. The structure of the pickup / mounting device is rational, the response of the entire device is fast, and the chip mounting efficiency and the chip mounting yield are greatly improved. [Selection diagram] Fig. 1