首页> 外国专利> PLATING METHOD, PLATING APPARATUS, ANODE HOLDER

PLATING METHOD, PLATING APPARATUS, ANODE HOLDER

机译:电镀方法,电镀装置,阳极保持器

摘要

Provided is a plating method for improving in-plane uniformity of various square-shaped substrates without changing an inter-electrode distance. A plating method according to an aspect in which an anode holder (44) adapted to hold a square-shaped anode (62) and a substrate holder (24) adapted to hold a square-shaped substrate (W) are disposed to face each other and plating processing is performed on the substrate (W), the anode holder (44) includes a holder main body (80) having a square-shaped opening and adapted to hold the anode (62) with a surface of the anode (62) exposed from the opening, and a mask (88) adapted to cover a part of the anode (62) inside the opening, and a position covered with the mask (88) is changed in accordance with the substrate (W).
机译:提供了一种用于改善各种方形基板的面内均匀性的电镀方法,而不改变电极间距离。根据一个方面的电镀方法,其中适于保持方形阳极( 62 )和基板支架( 24 <)的阳极保持器( 44 )和衬底支架( 24 < / b>)适于保持方形基板(w)彼此面对,并且在基板(w)上执行电镀处理,阳极保持器( 44 ),并适于将阳极( 62 )保持阳极的表面( 62 )暴露从开口和掩模( 88 )的一部分,以及用掩模覆盖的位置( 88 )根据基板(W)而改变。

著录项

  • 公开/公告号US2021071312A1

    专利类型

  • 公开/公告日2021-03-11

    原文格式PDF

  • 申请/专利权人 EBARA CORPORATION;

    申请/专利号US202017012018

  • 发明设计人 NAOKI SHIMOMURA;MIZUKI NAGAI;

    申请日2020-09-03

  • 分类号C25D17/10;H01L21/288;C25D7/12;C25D17;C25D17/08;

  • 国家 US

  • 入库时间 2022-08-24 17:38:46

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号