HIGH FREQUENCY CHARACTERISTIC INSPECTION APPARATUS AND HIGH FREQUENCY CHARACTERISTIC INSPECTION METHOD

摘要

An inspection probe is automatically connected to the substrate, and high-frequency characteristics are appropriately inspected. A high-frequency characteristic inspection device is a high-frequency characteristic inspection device that inspects a high-frequency characteristic of a substrate, and includes a movable inspection jig having a plurality of inspection probes for inspecting the substrate from the main surface side of the substrate, and An image pickup unit to capture an image; a substrate holder that holds the substrate and is movable in parallel with the main surface of the substrate; and, based on the image captured by the image pickup unit, at least the substrate holder is moved to move the inspection probe. And a control unit for contacting the substrate, wherein the control unit moves the substrate holder parallel to the main surface of the substrate to determine the position of the substrate relative to the inspection jig, and the inspection jig and the substrate holder Is relatively moved in the vertical direction of the main surface to contact the test probe to the substrate.