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Method for crushing or generating cracks of semiconductor raw material, and method for producing a lump of semiconductor raw material

机译:用于破碎或产生半导体原料裂缝的方法,以及制造半导体原料的块的方法

摘要

A method of crushing or generating a crack of a semiconductor raw material capable of suppressing contamination from an electrode material accompanying application of a high voltage pulse, and a method of producing a lump of semiconductor raw material are provided. In a method of crushing a semiconductor raw material by applying a high voltage pulse to a semiconductor raw material disposed in a liquid or generating a crack in a semiconductor raw material, a new fluid is directed toward at least one of a portion to which a high voltage pulse is applied or a peripheral portion of an electrode portion. Is supplied, and a new fluid and a part of the liquid are sucked and discharged from the liquid.
机译:提供了一种粉碎或产生能够抑制伴随伴随高压脉冲的电极材料污染的半导体原料的裂缝的方法,以及制造块的半导体原料的方法。在通过将高压脉冲施加到设置在液体中的半导体原料或在半导体原料中产生裂缝的半导体原料来挤压半导体原料的方法中,新的流体朝向高度的部分中的至少一个施加电压脉冲或电极部分的外围部分。供应,并从液体吸入和排出新的流体和一部分液体。

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