Transger unit and apparatus for treating substrate with the transfer unit

摘要

The present invention provides an apparatus for processing a substrate. According to an embodiment, an apparatus for processing a substrate includes an index module; And a processing module for processing a substrate, wherein the index module includes: a load port for loading a carrier storing a plurality of substrates; A transfer frame disposed between the processing module and the load port and transferring a substrate between the processing module and a carrier loaded in the load port, the processing module comprising: one or a plurality of processing chambers; And a transfer chamber for transferring a substrate to the process chamber, the transfer chamber comprising: a housing having a transfer space through which the substrate is transferred; A transfer robot disposed in the housing and transferring a substrate between processing modules; It may have an electrostatic pad provided in the transport space and provided to adsorb particles in the housing by electrostatic force.