METHOD FOR OPERATING MULTI-SPOT LASER GENERATING DEVICE, LASER GENERATING DEVICE AND LASER SYSTEM USING THE SAME

摘要

A laser generator according to an embodiment of the present invention includes a laser light source that generates a single spot laser light, a multi-spot generation unit that converts and outputs the single spot laser light incident from the laser light source into a multi-spot laser light, and an output. A spot size control optical system that adjusts the spot size of the multi-spot laser light to irradiate the target, an optical spot sensor that senses the shape of the spot of the multi-spot laser light irradiated to the target, and the shape of the sensed spot of the multi-spot laser light. Accordingly, it includes an optical system controller for controlling the spot size control optical system.