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Method and test system for evaluating the quality of a multi-channel micro- and / or sub-wavelength optical projection unit
Method and test system for evaluating the quality of a multi-channel micro- and / or sub-wavelength optical projection unit
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机译:用于评估多通道微频和/或子波长光学投影单元的质量的方法和测试系统
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摘要
A method for evaluating the quality of a multi-channel micro- and / or sub-wavelength optical projection unit (28) is disclosed. The method comprises the following steps: At least one predetermined section of the optical projection unit (28) is illuminated in such a way that an image is generated from at least two channels of the predetermined section of the multi-channel optical projection unit (28). At least one parameter is determined on the basis of the analysis of the image, a value of the parameter being assigned to a characteristic feature of the projection unit (28), a defect of the projection unit (28) and / or a defect class of the projection unit (28). The quality of the projection unit (28) is assessed using the at least one parameter. Furthermore, a test system (10) for evaluating the quality of a multi-channel micro- and / or sub-wavelength optical projection unit (28) and a computer program are disclosed.
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