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Method and test system for evaluating the quality of a multi-channel micro- and / or sub-wavelength optical projection unit

机译:用于评估多通道微频和/或子波长光学投影单元的质量的方法和测试系统

摘要

A method for evaluating the quality of a multi-channel micro- and / or sub-wavelength optical projection unit (28) is disclosed. The method comprises the following steps: At least one predetermined section of the optical projection unit (28) is illuminated in such a way that an image is generated from at least two channels of the predetermined section of the multi-channel optical projection unit (28). At least one parameter is determined on the basis of the analysis of the image, a value of the parameter being assigned to a characteristic feature of the projection unit (28), a defect of the projection unit (28) and / or a defect class of the projection unit (28). The quality of the projection unit (28) is assessed using the at least one parameter. Furthermore, a test system (10) for evaluating the quality of a multi-channel micro- and / or sub-wavelength optical projection unit (28) and a computer program are disclosed.
机译:公开了一种用于评估多通道微孔和/或子波长光学投影单元(28)的质量的方法。该方法包括以下步骤:光学投影单元(28)的至少一个预定部分以这样的方式照射,使得从多通道光学投影单元的预定部分的至少两个通道产生图像(28 )。基于图像的分析确定至少一个参数,将参数的值分配给投影单元(28)的特征,投影单元(28)的缺陷和/或缺陷类投影单元(28)。使用至少一个参数评估投影单元(28)的质量。此外,公开了一种用于评估多通道微孔和/或子波长光学投影(28)和计算机程序的评估的测试系统(10)。

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