Microscopic image measuring device and microscopic image measuring method

摘要

PROBLEM TO BE SOLVED: To perform highly accurate measurement when measuring a measurement object having a step exceeding the depth of focus or comparing patterns at different positions along the optical axis direction of a microscope in microscope image measurement. To do so. A microscope image measuring device extracts a spectroscopic image for each wavelength, a microscope that obtains a magnified image of the surface by irradiating the surface of an object to be measured with white epi-illumination, and a spectroscopic camera that obtains a spectroscopic image of the magnified image. The microscope is provided with an image processing unit that performs image measurement processing, and the microscope forms an image of a focal position different for each wavelength on the imaging surface of the spectroscopic camera, and the image processing unit has the wavelength at which the contrast of the measurement point is the highest. The spectral image is extracted and edge detection is performed. [Selection diagram] Fig. 1