Strain transducers insensitive to transverse and shear strains

摘要

1,059,074. Semi-conductor devices. WESTERN ELECTRIC CO. Inc. March 24, 1964 [March 29, 1963], No. 12303/64. Heading HIK. A piezo-resistive strain gauge comprising a wafer of semi-conductor material having a cubic crystal structure is made insensitive to transverse and shear strains by choosing the orientation of the plane of the wafer in relation to the crystal lattice according to one of three given formulµ which express this orientation in terms of the piezo-resistive and compliance coefficients of the material. One of the formulµ relates to current measurement in the plane of the wafer and the other two relate to current measurement perpendicular to this plane. Specific examples are given for N and P type germanium, silicon, and lead telluride.