A self-healing electrical duennschichtkondensator and a process for the preparation thereof

摘要

1,210,677. Thin film capacitors. HIRADASTECHNIKAI IPARI KUTATO INTEZET. 23 Nov., 1967 [23 Nov., 1966], No. 53428/67. Heading HIM. A self-heating thin layer capacitor comprises a substrate 1, a first aluminium electrode 2, a dielectric layer 3 and a second electrode 4 formed of a metal or alloy having a lower melting point than that of the first electrode, so that the metal of the upper electrode will melt first during the self-heating process. The lower melting point metal may be cadmium, lead, tin, zinc, indium, antimony or alloys thereof. The electrodes may be formed by cathode sputtering or vapour deposition; the dielectric may be formed by anodic oxidation or gas discharge plasma oxidation. In the latter case the dielectric may be magnesium fluoride.