首页> 外国专利> Holding device is made of graphite for the generation of isothermal temperature distributions on by means of high-frequency energy heated, epitaxial processes which are to be halbleiterplaettchen

Holding device is made of graphite for the generation of isothermal temperature distributions on by means of high-frequency energy heated, epitaxial processes which are to be halbleiterplaettchen

机译:保持装置由石墨制成,用于通过高频能量加热的外延过程在等温区上产生等温温度分布。

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