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A process for the preparation of a rod of semiconductor material for electronic purposes.

机译:一种用于电子目的的半导体材料棒的制备方法。

摘要

Pure silicon is deposited, e.g. from a gas, on to a rod of silicon containing a doping agent so as substantially to increase the cross-sectional area of the rod whereafter the rod is zone-melted, and optionally stretched. The process of deposition, zone-melting, and stretching may be repeated. The resistivity of the silicon may increase from 0,1 to 100 ohm-cm. p-doping agents specified are aluminium, boron, and gallium. n-doping agents specified are antimony, arsenic, and phosphorus. To effect doping, the rod may be rubbed with boron, or a filament of boron-containing glass applied thereto, and the rod then zone-melted.
机译:例如,沉积纯硅。从气体到含有掺杂剂的硅棒上,以实质上增加棒的横截面积,此后棒被区域熔化,并任选地被拉伸。可以重复沉积,区域熔化和拉伸的过程。硅的电阻率可以从0.1欧姆增加到100欧姆·厘米。指定的p掺杂剂是铝,硼和镓。指定的n掺杂剂是锑,砷和磷。为了进行掺杂,可以用硼或在其上施加的含硼玻璃丝摩擦棒,然后将棒区域熔化。

著录项

  • 公开/公告号DE1719024B2

    专利类型

  • 公开/公告日1971-07-01

    原文格式PDF

  • 申请/专利权人

    申请/专利号DE19591719024

  • 发明设计人

    申请日1959-09-24

  • 分类号B01J17/10;

  • 国家 DE

  • 入库时间 2022-08-23 09:44:06

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