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An energy analyzer to decomposition of an electron beam in elektronenbuendel a uniform energy

机译:能量分析仪分解电子束中电子束的均匀能量

摘要

1,074,625. Particle spectrometers. ASSOCIATED ELECTRICAL INDUSTRIES Ltd. April 6, 1964 [April 24, 1963], No. 16172/63. Heading H1D. A magnetic spectrometer suitable for introduction at an intermediate stage of a rectilinear particle path-e.g. in an electron microscopehas aligned entrance and exit apertures, and a non-uniform transverse magnetic field, such that charged particles of a desired mass or energy just perform one cycle of a trochoidal path in passing through the field, and therefore emerge from the spectrometer moving again along the axis. Polepieces 12 and 13 are mounted in an evacuated cylindrical container 1, half shown in Fig. 2, particles to be analysed entering through a central aperture in the upper closing diaphragm of the container (Fig. 1, not shown) and passing generally down the axis of the container, first through the non-uniform field between the inclined pole faces 31 and 32, and then through a tube 8, which acts as a magnetic screen and extends to a central, exit aperture in the bottom wall of the container, this aperture having an associated slit which is adjustable both in width and position. The magnetic field intensity and distribution are adjustable by adjustment of the magnet energizing current and-by rotation of the polepieces on their core members 14 and 15-of the inclination between the pole faces. If the planes of the latter intersect at a distance x = f from the axis, the flux density B in the direction between the pole faces is given by B = K/f-x, where K is a parameter dependent upon the magnet exciting current. Charged particles entering the spectrometer pursue a trochoidal path in this field, variation of the exciting current and pole face inclination permitting adjustment to a condition in which particles of a particular desired energy (eV, Fig. 5, not shown) just complete one cycle of the path in passing through the field, and therefore emerge from it travelling along the axis, and pass out through the spectrometer exit slit.
机译:1,074,625。粒子光谱仪。协会电气工业有限公司1964年4月6日[1963年4月24日],编号16172/63。标题H1D。适于在直线粒子路径的中间阶段引入的电磁光谱仪-例如在电子显微镜中,入射孔和出口孔对准,并且横向磁场不均匀,因此具有所需质量或能量的带电粒子在穿过场时仅执行摆线路径的一个周期,因此会从光谱仪的移动中出现再次沿着轴。极片12和13安装在一个抽空的圆柱形容器1中,如图2所示,其中一半要分析的颗粒通过容器上部封闭隔膜(图1,未显示)中的中心孔进入,然后大致向下通过。首先穿过倾斜的磁极面31和32之间的不均匀磁场,然后穿过管8,管8充当磁屏,并延伸到容器底壁的中心出口孔,该孔具有相关的狭缝,该狭缝的宽度和位置均可调节。磁场强度和分布可通过调节励磁电流和通过极靴在其芯构件14和15上的旋转来调节,这些极靴在极面之间具有倾斜度。如果后者的平面相距轴的距离为x = f,则在磁极面之间的方向上的磁通密度B由B = K / f-x给出,其中K是取决于磁体励磁电流的参数。进入光谱仪的带电粒子在该场中沿着摆线路径运动,励磁电流和极面倾斜度的变化允许调整到这样一种条件,即特定所需能量的粒子(eV,图5,未显示)仅完成一个周期的穿过磁场的路径,因此从沿轴行进的路径中出来,并穿过光谱仪的出口狭缝。

著录项

  • 公开/公告号DE000001498543C

    专利类型

  • 公开/公告日1973-08-09

    原文格式PDF

  • 申请/专利权人

    申请/专利号DE1498543A

  • 发明设计人

    申请日1964-04-21

  • 分类号H01J39/34;

  • 国家 DE

  • 入库时间 2022-08-23 07:13:48

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