THERMAL OXIDATION TESTER HEATER TUBE DEPOSIT EVALUATOR AND METHOD OF USING

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  机译： 量化热氧化测试管沉积物的方法和装置

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  机译： 相对于沉积的氧化物，热生长的氧化物和氮化物中的至少一种选择性地刻蚀多晶硅的方法，以及相对于BPSG选择性地刻蚀多晶硅的方法

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  机译： 相对于沉积氧化物基本上选择性地蚀刻热生长氧化物的方法

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