首页> 外国专利> Improvements to the methods of manufacture of electrodes in the form of grids for electron tubes, electrodes manufactured with the aid of these processes improved and the electronic tubes containing such electrodes

Improvements to the methods of manufacture of electrodes in the form of grids for electron tubes, electrodes manufactured with the aid of these processes improved and the electronic tubes containing such electrodes

机译:改进了用于电子管的栅格形式的电极的制造方法,改进了借助这些工艺制造的电极,以及包含这种电极的电子管

摘要

1,206,049. Blasting. COMPAGNIE FRANCAISE THOMSON HOUSTON-HOTCHKISS BRANDT. 1 March, 1968 [7 March, 1967], No. 10234/68. Heading B3D. [Also in Divisions Cl and H1] A method of making a perforate electrode for an electron discharge device comprises: (i) Forming a blank of pyrolytic graphite having its maximum conductivity directions parallel to major surfaces of the blank; (ii) discharging a jet of abrading material and directing the jet to impinge on a said major surface; (iii) producing relative movement between the jet and blank; (iv) restricting the areas of impact of said jet on said major surface to a predetermined pattern during said movement; and (v) continuing the discharge and relative movement until the blank has been completely perforated in accordance with said pattern. A pyrolytic graphite blank 10, Fig. 1, in the form of a tubular shell closed at one end is secured around a support 11 having a shank 11b held in a lathe chuck 11a. A mask 13 in the form of a tube of thin sheet steel or other material having circumferentially spaced longitudinal slots is mounted with a sliding fit on the blank 10. A blasting unit 14c has a nozzle 14 discharging abrasive powder, e.g. silicon powder, in a stream of pressure fluid, e.g. air at 4-7 atmospheres; the spacing of the nozzle tip from the mask may be 0À5-5 mm. The unit 14c is reciprocated by a lead-screw 16 controlled by limit switches 17, 18. Means may be provided for reversing the rotation of the spindle 11b to correct for lack of perpendicularity between the spindle and the nozzle. For manufacturing lattice-shaped grid electrodes, the mask is of wire, e.g. tungsten, molybednum, nickel, tantalum or the like, and has a diamond mesh-type lattice. In a modification, Figs. 3, 4, the mask is in two parts 102, 104, each in the form of a sheet metal tube having helical slots, oppositely inclined in the two parts; one part is inserted in the other part as a close fit, and the parts may be soldered in assembled position. In a further modification, Fig. 7, a wire 22 is wound helically around a tubular sheet metal member having longitudinal slots. Masks may be made from metal or plastic sheet and may be provided with a protective coating, e.g. of nickel, chromium &c. The mask may have a metal body provided with a readily renewable coating, e.g. plastic. If wires are used, they may have a coating of varnish or nitrocellulose. It is found that at an early stage of blasting the hole formed through the blank is strongly convergent; as blasting continues the angle of convergence diminishes. Just before the hole becomes cylindrical the outer end of the hole becomes rounded. This may be undesirable and in such cases blasting is stopped just before the hole becomes truly cylindrical, and the residual taper in the hole substantially compensated for by a short blasting step with the jet directed at the inner side of the blank. After the perforating operation, the jet may be directed at predetermined angles and for predetermined lengths of time at the outer and inner surfaces of the blank to produce the desired cross-sectional contours to the holes and intervening bars or strips. To produce a flat, e.g. disc-shaped, grid for use in an electron tube embodying flat electrodes, a pyrolytic graphite blank 31, Fig. 15, covered by a square-mesh wire mask 32, is mounted on an arm 33 moved up and down in a guideway 34 by a cam 35. The nozzle 14 is reciprocated by a lead-screw 16. In a modification, a number of blanks covered by wire-mesh masks are arranged in a circular array round a supporting disc mounted for rapid rotation; the nozzle is reciprocated. In another arrangement, Fig. 17, a partspherical pyrolytic graphite blank 38 covered by a wire mesh mask 39 is mounted at its centre on an arm 40 extending along a radius of the sphere and swivelled on a universal pivot 41 at the centre of the sphere; the arm 40 has imparted thereto a two-directional scanning motion as indicated by the arrows 42, 43; the nozzle 14 is stationary. The mask, instead of being formed separately from the blank, may be formed directly on the surface of the blank. E.g. the surface may be coated with a photosensitive varnish which is allowed to dry in the dark. The coated blank is then exposed to radiations, e.g. ultra-violet or visible light, through a mask similar in pattern to that of the mask to be formed. The blank is then dipped in solvent, e.g. trichloroethylene, to dissolve away the unexposed varnish. The blank is then passed through an electroplating bath to coat the areas laid bare with a metal coating, e.g. copper, nickel, chromium &e. After blasting, the metal coating constituting the mask is removed by dipping in an acid etching bath. In a modification, the blank is first copper-plated and the mask pattern etched thereon by photo-engraving. In another modification, the mask pattern is formed with a polymerizable resin, by a silkscreen process or otherwise, and the resin polymerized in situ. In a modification, Fig. 18, the rate of rotation of the spindle 11 is so correlated with the rate of traverse of the nozzle 14 that the jet 15 cuts into the blank 10 along a helical path 44, whereby the pattern cut out in the blank will be a mesh-type pattern generally similar to that obtained when using a mask, as shown in Fig. 7. The position of nozzle 14 may be displaced by a predetermined axial amount at each of a series of passes to form more than one intertwined helical cuts 44. Alternatively, the mask may be one or more helical strips wound round the blank or a plurality of circumferential strips, e.g. elastic bands, surrounding the blank, while the movements of spindle 11 and screw 16 are correlated to impart to jet 15 a selected path of relative movement with respect to the blank. Said path may be a helix of reverse pitch from that of the mask helix; said path may be a circumferential set of equispacial axial lines, in which case the spindle 11 is indexed instead of continuously rotated. In a modification, Fig. 19, no mask is applied to the blank, but a rotary obturator disc 45 is used, having a circumferential series of slots therein. For making a coaxial cylindrical pair of grids for a tetrode, a single mask 51, e.g. of the wire mesh type, is used having a wall thickness corresponding to the radial inter-grid spacing in the finished tube. The inner, control grid is produced by blasting a blank 50, Fig. 21, surrounded by the mask 51. To form the outer, screen grid, the mask 51 is inserted into a blank 50a, Fig. 22, which is blasted by a nozzle 52. The two electrodes are thus formed with accurately corresponding and registerable mesh patterns. In a modification, Fig. 23, inner and outer blanks 56, 55 are blasted at the same time, using a mask 57, e.g. of molybdenum. In a modification, Fig. 24, outer and inner tubular blanks 60, 61 have substantially different diameters. Blank 61 is mounted on circular base 66 secured on rotatable shaft 68. A tubular mask 62 is mounted as a close sliding fit within blank 61 for bodily rotation therewith, the mask having a main mesh section 64 and solid end sections 63. Blank 60 is mounted on an annular base 67 secured on a tubular shaft 81 rotatable in eccentric relation with respect to shaft 68. Shaft 81 is coupled for rotation with inner shaft 68 by gears 69, 70, 71, 82. A nozzle 65 is reciprocated across the height of the mesh section 64 of the mask, with its outlet directed radially towards the common tangential area of blanks 60, 61. In all embodiments blasting may be monitored by means such as thickness gauges, transparency inspection using a light beam and a photo-electric cell, capacitance indicating means with a pair of electrodes positioned on opposite sides of the blank, optical contourdetecting means &c.
机译:1,206,049。爆破。 COMPAGNIE FRANCAISE THOMSON HOUSTON-HOTCHKISS BRANDT。 1968年3月1日[1967年3月7日],编号10234/68。标题B3D。 [也在C1和H1中也]一种制造用于电子放电装置的穿孔电极的方法包括:(i)形成具有最大导电率方向平行于毛坯主表面的热解石墨毛坯; (ii)排出研磨材料射流并引导该射流撞击在所述主表面上; (iii)在喷嘴和坯料之间产生相对运动; (iv)在所述运动期间将所述射流在所述主表面上的撞击区域限制为预定的图案; (v)继续排出和相对运动,直到坯件按照所述图案完全穿孔为止。图1的热解石墨坯料10,其一端封闭的管状壳体的形式被固定在具有柄11b的支撑件11上,该柄11b被保持在车床卡盘11a中。以薄钢板或其他材料制成的具有沿周向间隔开的纵向槽的管形式的面罩13以滑动配合的方式安装在坯件10上。喷砂单元14c具有喷嘴14,该喷嘴14排出例如粉末状的磨料。硅粉,在压力流体流中,例如空气在4-7个大气压下;喷嘴尖端与面罩的间距可以为0‑5-5 mm。单元14c通过由限位开关17、18控制的导螺杆16来往复运动。可以提供用于使主轴11b的旋转反向以校正主轴和喷嘴之间缺乏垂直性的装置。为了制造格子状的栅电极,该掩模是金属丝,例如金属丝。钨,钼,镍,钽等,并且具有菱形网状格。在一个变型中,图1至图4示出了图1至图4。在图3、4中,面罩分为两个部分102、104,每个部分为具有螺旋槽的金属板管的形式,在两个部分中相对地倾斜;一个零件紧密配合地插入另一零件中,并且这些零件可以在组装位置进行焊接。在进一步的修改中,图7,线材22螺旋地缠绕在具有纵向槽的管状金属板构件上。面罩可以由金属或塑料片制成,并且可以设置有保护性涂层,例如金属或塑料。镍,铬等面罩可具有金属体,该金属体具有易于再生的涂层,例如金属。塑料。如果使用电线,它们可能会有清漆或硝酸纤维素涂层。发现在喷砂的早期阶段,通过坯料形成的孔会聚得很厉害。随着爆破的继续,会聚角减小。在孔变为圆柱形之前,孔的外端变为圆形。这可能是不希望的,并且在这种情况下,刚好在孔变成真正的圆柱形之前停止喷砂,并且通过将喷头指向坯料的内侧的短喷砂步骤,基本上补偿了孔中的残留锥度。在穿孔操作之后,射流可以在坯料的外表面和内表面上以预定的角度和预定的时间长度被引导,以对孔和居间的条或条产生期望的横截面轮廓。制作平板,例如圆盘形的栅格,用于带有扁平电极的电子管中,图15所示的热解石墨毛坯31,由方形网罩32覆盖,被安装在臂33上,该臂在导轨34中上下移动。喷嘴14由导螺杆16往复运动。在一种改型中,由金属丝网掩膜覆盖的多个坯件以圆形阵列布置在支撑盘上,该支撑盘安装成可快速旋转。喷嘴往复运动。在图17的另一种布置中,由金属丝网掩膜39覆盖的部分球形热解石墨坯料38在其中心处安装在沿球体的半径延伸的臂40上并且在球体的中心处的万向枢轴41上旋转。 ;如箭头42、43所示,臂40施加了双向扫描运动。喷嘴14是固定的。代替与坯料分开形成的掩模可以直接在坯料的表面上形成。例如。表面可以涂上光敏清漆,然后在黑暗中干燥。然后将涂覆的坯料暴露于例如紫外光或可见光,通过与要形成的掩模类似的图案形成的掩模。然后将坯料浸入溶剂中,例如三氯乙烯,以溶解掉未暴露的清漆。然后使坯料通过电镀浴,以用金属涂层例如金属涂层涂覆裸露的区域。铜,镍,铬等。喷砂后,通过浸入酸蚀刻浴中除去构成掩模的金属涂层。在一种变型中,首先将坯件镀铜,并通过照相雕刻在其上蚀刻掩模图案。在另一个变型中,掩模图案由可聚合树脂通过丝网印刷工艺或其他方式形成。,树脂就地聚合。在图18的变型中,主轴11的旋转速率与喷嘴14的移动速率相关,以使射流15沿螺旋路径44切入坯料10,从而在喷嘴中切出图案。如图7所示,坯料将是通常类似于使用掩模时获得的网状图案。在一系列通过中的每一次通过中喷嘴14的位置可以偏移预定轴向量以形成一个以上。缠绕的螺旋切口44。替代地,面罩可以是缠绕在坯料周围的一个或多个螺旋带或多个周向带,例如围绕坯料的弹性带,同时使主轴11和螺杆16的运动相关联,以将相对于坯料的相对运动的选定路径赋予射流15。所述路径可以是与掩模螺旋线的螺距相反的螺线;所述路径可以是等间隔轴线的圆周组,在这种情况下,主轴11被分度而不是连续旋转。在图19的变型中,没有将掩模施加到坯料上,而是使用了旋转的密闭盘45,其内部具有周向的一系列缝隙。为了制造用于四极管的同轴圆柱形的栅格对,单个掩膜51,例如,掩模51,被制成为四面体。所使用的金属丝网类型的壁厚与成品管中的径向网格间距相对应。内部控制网格是通过喷砂被遮罩51包围的图21的毛坯50制成的。为形成外部筛网,可将遮罩51插入图22的毛坯50a中,并通过喷砂将其喷砂。因此,两个电极形成有精确对应且可配准的网状图案。在图23的一个变型中,使用例如玻璃罩57的掩模57同时喷砂内部和外部坯料56、55。钼在图24的变型中,外部和内部管状坯料60、61具有基本不同的直径。坯件61安装在固定在可旋转轴68上的圆形基座66上。管状面罩62以紧密滑动配合的方式安装在坯件61内,以随其一起旋转,该面罩具有主网状部分64和实心端部63。坯件60为安装在固定于管状轴81上的环形基座67上的环形基座67上,该轴可相对于轴68偏心旋转。轴81通过齿轮69、70、71、82与内轴68连接以便旋转。喷嘴65在整个高度上往复运动掩模的网状部分64的横截面是成对的,其出口径向指向坯料60、61的公共切线区域。在所有实施例中,可通过诸如厚度计,使用光束和光电的透明度检查的方法来监测喷砂。单元,电容指示装置,在坯料的相对侧上具有一对电极,光学轮廓检测装置&c。

著录项

  • 公开/公告号JPS4921593B1

    专利类型

  • 公开/公告日1974-06-03

    原文格式PDF

  • 申请/专利权人

    申请/专利号JP19680014359

  • 发明设计人

    申请日1968-03-07

  • 分类号

  • 国家 JP

  • 入库时间 2022-08-23 06:21:37

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