METHOD OF GROWING 1-0-0 ORIENTATION HIGH PERFECTION SINGLE CRYSTAL SILICON BY ADJUSTING A FOCUS COIL

摘要

Silicon monocrystals having a 1-0-0 crystallographic orientation are prepared using a crystal growing apparatus of the float zone type having a heating coil and upper and lower focusing coils, wherein the silicon feed bar is held upright and moved downward as the monocrystal rod is formed. After the stem of the monocrystal has been grown, the lower focusing coil is lowered slightly, thus producing a condition more conducive to the formation of the 1-0-0 crystalline structure.