Carrier lifetime measuring device - nondestructively measures local carrier lifetime in SC plate, esp. in silicon plate

摘要

An oscillating circuit is connected to an h.f. oscillator, and the SC plate zone to be tested is capacitively coupled to the oscillating circuit, which is damped in accordance with the plate conductance. The plate is illuminated with light flashes, and a meter is connected to the oscillating circuit, which measures its resonance voltage, this being a measure for the conductance of the SC plate coupled zone. The variation of this value in time gives the carrier lifetime in the plate zone illuminated by the light flashes.