Vacuum measurement on two different measuring principles - with heat conductivity vacuum gauge combined with aneroid vacuum gauge

摘要

The heat conductivity vacuum gauge is combined with an aneroid vacuum gauge and the data pick-ups belonging to these vacuum gauges are accommodated inside a measuring tube. The data pick-up of the aneroid vacuum gauge consists of a silicon diaphragm siphon which is located in a housing with an opening formed by a delivery tube containing a filter. One unit only is needed to supply electrical power to the data pick-ups. This unit has only one indicator instrument with two pressure ranges. Switching from one range to the other is done either manually or automatically.