Inner layer insulation testing for multi-layer integrated circuits - fully parallel, to unequivocal parameters, naked eye identifies defects

摘要

An arrangement for testing the inner layers of multi-layer conductor plates, in which a number of contact points laid out in grid patterns, are isolated wholly or in part from the surrounding potential surface, by channels etched through the copper cladding to the non-conducting carrier matl.; has for the conductor plate to be tested - the specimen, a surface adaptor. this is electrically conductive in zones corresp. to those of the specimen and the various zones are linked to one pole of a test power supply. Between the adaptor and the specimen, there is a non-conducting mask with a number of drillings, each one of which corresponds to an isolated contact point on the specimen, and the potential surface of the specimen is linked to the other pole of the test power supply which is of sufficient tension to ensure that where the contact points are defectively isolated, a spark cna bridge the gap of the thickness of the mask. The inspection for satisfactory insulation is effected directly and without any additional treatment of the surface of the layer. Points where the insulation resistance is lacking are blackened so that they can be picked out by the naked eye.