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offenroehriges method for the diffusion of gallium in silicon
offenroehriges method for the diffusion of gallium in silicon
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机译:场滴灌法研究镓在硅中的扩散
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摘要
A process for diffusing gallium into a semiconductor material is disclosed in which a gaseous mixture of argon and carbon monoxide is used to transport the gallium in an open tube diffusion furnace to the semiconductor material contained in the tube where the gallium diffusion takes place.
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