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Liquid phase epitaxial process for growing semi-insulating GaAs layers
Liquid phase epitaxial process for growing semi-insulating GaAs layers
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机译:生长半绝缘GaAs层的液相外延工艺
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摘要
Disclosed is a process for fabricating chromium-doped semi- insulating epitaxial layers of gallium arsenide which includes contacting a gallium arsenide substrate with a chromium-doped saturated solution of gallium arsenide in gallium and maintaining the solution at a relatively low liquid phase epitaxial (LPE) deposition temperature on the order of about 750°-850° C.
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