Low energy electron spectrometer for molecular analysis - uses oblique reflective electrostatic chamber and accelerator

摘要

A low energy electron spectrometer is for use in atomic molecular, medical and aerosol analysis techniques. It is particularly for the detection of tunnel electrons. The beam of low energy electrons is partially reflected by an oblique electrostatic chamber into an accelerating chamber. The electrons from the source being analysed (1) enter the device through an aperture and travel through a decelerating lens array (2) into an oblique parallel plate (10, 11) electrostatic chamber in which a homogeneous field is established by a series of equipotential layers (12). Some of these electrons are reflected through an aperture (14) into a post accelerator (4) consisting of an array of parallel grids (15, 16, 17) and from this into an analysis chamber (5).