Penetration raster electron microscope - has condenser lens of rotation asymmetrical type, imaging radiation source linearly in specimen plane and with specified resolution capacity

摘要

The electron microscope contains a radiation source, a condenser lens for focussing the electron beam onto a specimen, a deflection system, and a register and an imaging device of the irradiated specimen region. The condenser lens is of rotation-asymmetrical type, which images t he radiation source linearly in the specimen plane. The lens regulation capacity at right angles to the radiation source line is better than in parallel direction. The deflection system converges the electron beam in the direction of better regulation capacity of the condenser lens. A second similar lens is mounted in the beam direction behind the specimen and reproduces the specimen plane into an image plane. The resultion capacity of the second lens is better at right angles to the beam deflection than parallel to the same.