首页> 外国专利> Taidenbiimunoshusashuseisochi

Taidenbiimunoshusashuseisochi

机译:Tai den比IM uno是USA曙色ISO吃

摘要

A beam of charged particles is deflected in a closed path such as a square, for example, over a cross wire grid at a constant velocity by an X Y deflection system. A small high frequency jitter is added at both axes of deflection to cause oscillation of the beam at 45 DEG to the X and Y axes. From the time that the leading edge of the oscillating beam passes over the wire until the trailing edge of the beam passes over the wire, an envelope of the oscillations produced by the jitter is obtained. A second envelope is obtained when the leading edge of the beam exits from being over the wire until the trailing edge of the beam ceases to be over the wire. Thus, a pair of envelopes is produced as the beam passes over each wire of the grid. The number of pulses exceeding ten per cent of the peak voltage in the eight envelopes produced by the beam completing a cycle in its closed path around the grid are counted and compared with those counted during the previous cycle of the beam moving in its closed path over the grid. As the number of pulses decreases, the quality of the focus of the beam increases so that correction signals are applied to the focus coil in accordance with whether the number of pulses is increasing or decreasing.
机译:带电粒子束通过X Y偏转系统以恒定的速度在恒定的速度下,例如在正方形的闭合路径中偏转。在偏转的两个轴上都添加了一个小的高频抖动,以使光束在45°处相对于X和Y轴振荡。从振荡光束的前缘越过导线直到光束的后缘越过导线,都获得了由抖动产生的振荡的包络线。当光束的前缘从金属丝上方离开直到光束的后缘不再在金属丝上方时,获得第二包络线。因此,当光束通过栅格的每条导线时,会产生一对包络线。对光束在其围绕电网的闭合路径中完成一个周期的八个包络中超过峰值电压的百分之十的脉冲数进行计数,并将其与光束在其闭合路径中沿其闭合路径移动的前一个周期中计数的脉冲数进行比较。网格。随着脉冲数量的减少,光束的聚焦质量增加,从而根据脉冲数量是增加还是减少将校正信号施加到聚焦线圈。

著录项

  • 公开/公告号JPS5420396B2

    专利类型

  • 公开/公告日1979-07-23

    原文格式PDF

  • 申请/专利权人

    申请/专利号JP19750063090

  • 发明设计人

    申请日1975-05-28

  • 分类号E01C11/26;H01J37/153;H01J37/21;H01J37/244;H01J37/30;H01J37/305;H01L21/027;H05B3/36;H05B3/56;

  • 国家 JP

  • 入库时间 2022-08-22 21:09:49

相似文献

  • 专利
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号