Rotatable table for automatic tester - holds semiconductor wafers which can be electronically heated or cooled and subjected to pressure or vacuum

摘要

The rotatable table holds semiconductor wafers etc., and consists of a stationary and a rotatable part, with a bearing plate. It has a heater for the water and a pneumatic device generating pressure or vacuum in recesses in the bearing plate. The wafer heater is in the rotatable part, and can be switched to a cooling operation. The rotatable part has a cable connecting the electric heating/cooling device with the stationary part. The rotatable part can also have a pneumatic connector coupled to the recesses in the bearing plate and the pneumatic device.