The regulation of the flux molecular, and its application to the techniques of co - evaporation

摘要

P system for automatic regulation of the density in a given point of a molecular species known, in an apparatus called a flow or molecular beam epitaxy / p & & p & in a vacuum enclosure 1, a probe 14 of analysis by mass spectrometry (quadripole electrostatic) receives the species projected by evaporation, 12, 13 that it ionizes, filtered and as a function of their respective masses. The heating of each cell is regulated by a control loop including the means of analysis of the kind in question. / p & & p & application to the epitaxy, and to the embodiment of the contacts with a thin layer. / p