Optical device, a source coherent for the rapid transfer of the patterns on substrates, applied to the embodiment of components and circuits have microstructures

摘要

P the invention relates to optical devices intended for the transfer of the patterns on a photosensitive surface. / p & & p & photoreproducteur the device according to the invention comprises a source of coherent radiation which is intended to provide for a given duration, an illumination of the photosensitive surface associated with transmission means of introducing a phase modulation of the radiation used to average, during the exposure time, the interference generated by the coherence of the radiation / p & & p & in particular, the invention applies to machines for the transfer by contact, the vicinity or projection, to photorepeaters of masks and to direct photorepeaters. / p