Acoustic resonator and strain gauge from monolithic silicon - has flexible section reacting to mechanical vibrations at resonance frequency

摘要

An acoustic resonator and a strain gauge are made from a monolithic silicon substrate using selective etching techniques. It is formed from a single crystal of the semi-conductor material and has one or more flexible sections which are formed by the selective etching. The flexible sections can react to applied mechanical vibrations at its resonance frequency. The strain gauge contains a silicon wire (11) forming an integral part of the fixing surfaces (12) at the ends. The wire is stretched between the supports (13) of the fixing plates.