MANUFACTURE OF INDEFINITE FORM SILICON SPUTTERED TO ADJUSTED MONOHYDROGENATED AND POLYHYDROGENATED BOND DENSITY

摘要

A reactively sputtered photoconductive amorphous silicon film having a controlled monohydride and polyhydride bond density is produced by applying a voltage bias to the film's substrate (14) during reactively sputtering a layer of amorphous silicon in a partial pressure of hydrogen.