METHOD FOR BONDING ROTARY TARGET ASSEMBLY FOR SPUTTERING AND ROTARY TARGET ASSEMBLY FOR SPUTTERING MANUFACTURED BY BONDING METHOD

摘要

The present invention relates to a method for bonding a rotary target assembly for sputtering and a rotary target assembly for sputtering manufactured by the bonding method. When bonding a sputtering target on an outer circumferential surface of a backing tube, the sputtering target can be bonded through injecting elastomer, thereby enabling a low-temperature combination. To achieve this, according to the present invention, a method for bonding a sputtering target on an outer circumferential surface of a backing tube comprises steps of: (a) normally positioning a backing tube on a surface plate to a longitudinal direction; (b) fixedly coupling a target support pipe on an outer circumferential surface of a lower end portion of the backing tube; (c) normally positioning a gap between an outer circumferential surface of the backing tube and an inner circumferential surface of the sputtering target to be uniform; (d) injecting liquid elastomer a gap between the backing tube and the sputtering target; and (e) bonding the sputtering target on an outer circumference of the backing tube.;COPYRIGHT KIPO 2015