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turbomolecuulpomp with a steunleger and a magnetic centreringsleger.
turbomolecuulpomp with a steunleger and a magnetic centreringsleger.
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机译:Turbomolecuulpump与支援部队和磁性对中部队。
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摘要
The vertical rotating assembly of a vacuum pump (comprising a turbomolecular rotor and the rotating member of an electric driving motor located under the rotor) is centered by a magnetic bearing located above the pump rotor and is supported by a ball bearing assembly located under the rotor and the motor. The ball bearing assembly is so constructed or connected to the pump housing as to tolerate radial deflection of the rotor.
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