High-energy TEA laser with ionizing rods arranged parallel to the laser axis

摘要

In a high-energy TEA laser, especially a TEA excimer laser, excited by capacitor discharge, which is as homogenous and arc-free as possible, in the gas chamber (1), between at least two electrodes (E1, E2) of a discharge tube (L) extending parallel to the optical axis of the laser and located at a distance opposite one another, at least one of the electrodes (E1, E2) projects into the discharge chamber (1) with a mushroom stem (4), used for the power supply, and the mushroom cap (5), used for power distribution. For pre-ionising of the discharge chamber (1), at least one rod-shaped auxiliary electrode (H), consisting of an inner conductor (7) and a dielectric (8) surrounding this inner conductor (7), is arranged between, or adjacent to, the electrodes (E1, E2), parallel to the axis and with a spark-over separation (a2) from one of the electrodes (E1, E2). IMAGE