Method of displaying the logic status of several neighbouring modes in integrated circuits in a logic picture by using a pulsed-electron probe

摘要

In order to be able to represent logical changes in the state of several adjacent circuit nodes in integrated circuits in a logic image by means of a pulsed electron probe even on short interconnect sections, the pulsed electron probe on the integrated circuit always scans the same distance in the x direction, with the phase of the electron pulses being the same with each new one procurement is continuously shifted. The sample can be imaged up to the acquisition line and the y-deflection of the pulsed electron probe can only be recorded at this acquisition line.