Charged particle mass dispersion analyser - has two separate staggered axis exit apertures angled and with intermediate electrical field

摘要

The energy or charged particle dispersion analyser features two apertures using angled charged plates so that an inhomogeneous electric field exists between them. The analyser has a 127 degree entry to exit pupil arc and a second exit pupil aperture plate (16,17) is angled (beta) in the particle path (5) behind the first exit pupil aperture (11) plate (12). The two plates (17,18) used to form the second aperture unit (16) are electrically separated from one another. Also the apertures (11,19) in the two plates (12,16) are offset from one another.