首页> 外国专利> MASS SPECTROMETRY FOR A GAS ANALYSIS WITH A TWO-STAGE CHARGED PARTICLE DEFLECTOR LENS BETWEEN A CHARGED PARTICLE SOURCE AND A CHARGED PARTICLE ANALYZER BOTH OFFSET FROM A CENTRAL AXIS OF THE DEFLECTOR LENS

MASS SPECTROMETRY FOR A GAS ANALYSIS WITH A TWO-STAGE CHARGED PARTICLE DEFLECTOR LENS BETWEEN A CHARGED PARTICLE SOURCE AND A CHARGED PARTICLE ANALYZER BOTH OFFSET FROM A CENTRAL AXIS OF THE DEFLECTOR LENS

机译:带有两级带电粒子偏转器透镜和带电粒子分析器的两级带偏转粒子镜的质谱分析

摘要

Apparatus, methods and systems are provided to inhibit a sightline from a charged particle source to an analyzer and for changing a baseline offset of an output spectrum of an analyzer. A supply of charged particles is directed through a hollow body of a deflector lens that is positioned relative to a charged particle source and an analyzer. A flow path along a preferred flow path through a deflector lens permits passage of the ions from the source to the detector while inhibiting a sightline from the detector to the source in a direction parallel to the central longitudinal axis of the deflector lens.
机译:提供了用于抑制从带电粒子源到分析仪的视线并且用于改变分析仪的输出光谱的基线偏移的设备,方法和系统。带电粒子的供应被引导通过相对于带电粒子源和分析仪放置的偏转透镜的中空体。沿着通过偏转透镜的优选流动路径的流动路径允许离子从离子源通过到检测器,同时在平行于偏转透镜的中心纵轴的方向上抑制从检测器到离子源的视线。

著录项

  • 公开/公告号EP2718960B1

    专利类型

  • 公开/公告日2020-04-22

    原文格式PDF

  • 申请/专利权人 MKS INSTRUMENTS INC.;

    申请/专利号EP20120724801

  • 发明设计人 SHAW PHILIP NEIL;BATEY JONATHAN HUGH;

    申请日2012-05-17

  • 分类号H01J49/06;

  • 国家 EP

  • 入库时间 2022-08-21 11:42:45

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