Optical components surface checking interferometer - has beam splitter, reference surface and lens system forming interference pattern

摘要

High-quality control of convex surfaces in optical components of large and small dia. is ensured by the interferometer which does not require laborious adjustment and is small. It comprises a monochromatic light source and successively mounted objective, light beam splitter followed by a compensator and a lens system. The last surface in the direction of ray travel exhibits a reference spherical shape with a centre that is optically conjugated with the back focus of the objective via the compensator. The control is carried out for two ratios of D/R, where D is the dia. of the component and R is the radius of the checked surface. With the set mirror (2), the rays of monochromatic source (I) are directed to the focusing objective (3). After the passage through the beam splitter (4) and compensator (5) the rays reach the reference surface (A) via lenses (7-10). The transmitted rays impinge on the tested surface (15) and interfere with those reflected from surface (A) to provide a pattern for the recorder (11).