Temperature compensated thin film strain gauge - having transducer and temperature compensation resistors

摘要

Transducer has a flexure element deformable in response to an applied force, a thin insulating film deposited on the flexure element, at least one thin film strain gauge resistance element deposited on the insulator material, so as to be strained on deformation of the flexure element, the resistance being of a first material having a first temperature coefficient of resistance, at least two thin film leads deposited on the insulator, the leads having a thin layer of the first material connected to the strain gauge resistance and a further layer of a second material having a second temperature coefficient of opposite algebraic sign to that of the first material, and at least one thin film temperature compensation resistance deposited on the insulating film over a position on the flexure element not subject to strain on flexure of the element. The temperature compensation resistance comprises a layer of the second material over the thin layer of the first material on the insulating layer. Transducer is simple and therefore quick and cheap to mfr.