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Method for making planar optical waveguide comprising thin metal oxide film incorporating a relief phase grating
Method for making planar optical waveguide comprising thin metal oxide film incorporating a relief phase grating
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机译:包括结合有浮雕相位光栅的薄金属氧化物膜的平面光波导的制造方法
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摘要
Enhanced optical coupling by phase evanescent fields is achieved by covering the planar layer of a waveguide with a thin metal oxide film incorporating a relief phase grating. The grating is originally formed in a metallic film covering the planar layer, which metallic film is converted to a metal oxide film by heating in an oxygen- containing atmosphere.
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