Process for the surface-annealing of semi-conductor materials by pulsed microwave energy

摘要

- list of semiconductor materials.;the annealing process of semiconductor material surface is characterized in that a sample of the semiconductor material in a resonant cavity.it is a pulse of microwave in the cavity and gives the pulse duration and the power sufficient to cause the annealing and / or melting of the sample and itssubsequent deformation.;application to the crystallization of a layer of an amorphous semiconductor material deposited on a substrate.