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method for setting a stable combustion zone at a halbleiterkristallstabes tiegelfreien zone fusion

机译:法在halbleiterkristallstabestiegelfreien区融合处设置稳定燃烧区的方法

摘要

A stable melting zone is maintained during the crucible-less zone melting of a semiconductor crystal bar with dia. 30 mm, the process effected under specific. conditions, with a single-turn inductive heating coil, the inside dia. of the coil is set to be smaller than the dia. of the bar, fed into the melting zone. When the bar dia. of the recrystallised bar lies within 30-50 mm, the outside height of the melting zone is set to a value between 15 and 23mm. The stability of the melting zone is ensured even for bars of large dia. of over 75 and 100mm. The crystals produced are free from dislocations.
机译:在具有直径的半导体晶体棒的无坩埚区熔化期间,保持稳定的熔化区。 > 30 mm,该过程在特定条件下进行。条件下,用单匝感应加热线圈,内径。线圈的直径设置为小于直径。棒材,送入熔化区。当酒吧直径。重结晶棒的厚度在30-50mm之内,熔化区的外部高度设定在15-23mm之间。即使对于大直径的棒材,也能确保熔化区的稳定性。超过75和100毫米。产生的晶体没有位错。

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