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Apparatus for maintaining adjustment of coincidence and relative phase relationship of light beams in an interferometer

机译:用于在干涉仪中保持光束的重合和相对相位关系的调整的设备

摘要

An apparatus for maintaining the adjustment of coincidence and relative phase relationship of light beams in an optical interferometer comprises the passing of a measuring light beam and of a control beam through substantially the same paths of the interferometer. Any change in optical alignment of interferometer components from a set condition is manifest as a change of the electrical signal produced by photoelectric sensing means which receive the control beam. The change of the electrical signal is processed by an electrical circuit and fed to one or more positioning means supporting an optical component of the interferometer for causing a repositioning of such component to thereby restore the set condition. In a typical embodiment, the component is a reflective surface mounted on a set of piezoelectric positioning means.
机译:一种用于维持光学干涉仪中光束的重合和相对相位关系的调节的设备,包括使测量光束和控制光束通过干涉仪的基本相同的路径。干涉仪组件的光学对准与设定条件的任何变化都表现为由接收控制光束的光电传感装置产生的电信号的变化。电信号的变化由电路处理,并馈送到支撑干涉仪的光学部件的一个或多个定位装置,以引起该部件的重新定位,从而恢复设置状态。在典型的实施例中,该部件是安装在一组压电定位装置上的反射表面。

著录项

  • 公开/公告号US4379633A

    专利类型

  • 公开/公告日1983-04-12

    原文格式PDF

  • 申请/专利权人 KRAUTKRAMER-BRANSON INC.;

    申请/专利号US19810282036

  • 发明设计人 WOLF BICKEL;ERIK PRIMBSCH;WALTER KAULE;

    申请日1981-07-10

  • 分类号G01N29/04;G01B9/02;

  • 国家 US

  • 入库时间 2022-08-22 09:51:11

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