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PRODUCTION OF SEMIIINSULATING GAAS EPITAXIAL LAYERS AND FORMATION OF MULTILAYER STRUCTURE
PRODUCTION OF SEMIIINSULATING GAAS EPITAXIAL LAYERS AND FORMATION OF MULTILAYER STRUCTURE
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机译:半绝缘气体表观层的生产和多层结构的形成
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摘要
PURPOSE:To produce semi-insulation type GaAs by epitaxially forming GaAs through the use of alkyl Ga and arsine and introducing alkyl Al into a reaction chamber.
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