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Process for in-situ formation of niobium-insulator-niobium Josephson tunnel junction devices
Process for in-situ formation of niobium-insulator-niobium Josephson tunnel junction devices
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机译:铌-绝缘体-铌约瑟夫森隧道结装置的原位形成方法
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摘要
A method of forming a superconductor-barrier-superconductor junction device by the steps of depositing a first superconductive layer on a substrate, forming a barrier layer on the first superconductive layer and depositing a second superconductive layer on the barrier layer. A layer of photoresist is then deposited over the second superconductive layer and patterned together with the second superconductive layer to form a mesa structure. A dielectric layer is deposited over the mesa structure, and the photoresist layer portion is dissolved thereby lifting off the dielectric portion overlying said second superconductive layer portion.
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