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Wavefront sensor using a surface acoustic wave diffraction grating

机译:使用表面声波衍射光栅的波前传感器

摘要

A wavefront sensor for detecting the slope of an input wavefront. A surface acoustic wave reflective diffraction grating is positioned at a focal point of the wavefront, and generates surface acoustic waves at two primary frequencies f.sub.1 and f.sub.2. The reflective diffraction grating produces a first AC shearing interferogram between two like diffraction orders generated by the f.sub.1 and f.sub.2 surface acoustic waves. A photodetector array is positioned to detect the shearing interferogram at a two dimensional array of zones, and the phase of the output signal for each zone is representative of the local slope of the wavefront in the direction of shearing, thus producing the slope in one direction. Complete two dimensional wavefront slope information is obtained by shearing the wavefront in a second orthogonal direction in substantially the same manner utilizing a second surface acoustic wave diffraction grating and a second photodetector array.
机译:波前传感器,用于检测输入波前的斜率。表面声波反射衍射光栅位于波阵面的焦点处,并以两个主频率f 1和f 2产生表面声波。反射衍射光栅在由f1和f2表面声波产生的两个类似衍射级之间产生第一AC剪切干涉图。放置光电检测器阵列以在区域的二维阵列处检测剪切干涉图,并且每个区域的输出信号的相位代表在剪切方向上波前的局部斜率,从而在一个方向上产生斜率。通过使用第二表面声波衍射光栅和第二光电检测器阵列以基本上相同的方式在第二正交方向上剪切波前,可以获得完整的二维波前斜率信息。

著录项

  • 公开/公告号US4474467A

    专利类型

  • 公开/公告日1984-10-02

    原文格式PDF

  • 申请/专利权人 ITEK CORPORATION;

    申请/专利号US19810335118

  • 发明设计人 JEFFREY H. EVERSON;JOHN W. HARDY;

    申请日1981-12-28

  • 分类号G01B9/02;

  • 国家 US

  • 入库时间 2022-08-22 08:37:24

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