MIRROR-FACE POLISHING FOR INNER SURFACE OF RING-SHAPED PART MADE OF CERAMICS

摘要

PURPOSE:To efficiently mirror-face-polish the inner surface of a ring-shaped part by using the ceramics media having a size to permit and to prevent the passing through the part and using silicon carbide as the abrasive material for the first polishing and alumina powder for the finishing polishing. CONSTITUTION:When the inner surface of a ring-shaped part made of ceramics is to be mirror-face-polished, barrel polishing is performed by using the ceramics media having a size to permit the passing through the ring-shaped part, the ceramics media having a size to prevent the passing through the part, and the abrasive material containing silicon carbide powder and water as main constituents. Further, barrel polishing is performed by using the ceramics media having a size to permit the passing through the part, the media having a size to prevent the passing through the part, and the abrasive material containing alumina powder and water as main constituents. The ring-shaped parts can be made of the oxide-series ceramics such as alumina or the nonoxide-series ceramics such as silicon nitride.