PHOTORESIST STRIPPER CONTAINING NO BROWN CONTAMINATED SUPPRESSION PHENOL AND NO CHLORINATED HYDROCARBON

摘要

Stripping solution compositions which avoid the problem know as "brown staining" are provided. Relevant stripping solutions are those that are free from phenol and chlorinated hydrocarbon compounds and comprise a surfactant alkylarylsulfonic acid having 12-20 carbons, a hydrotropic aromatic sulfonic acid having 6-9 carbons and a halogen-free aromatic hydrocarbon solvent with a boiling point above 150° C. To suppress brown staining, a water soluble sulfone is incorporated into the stripping solution. The stripping compositions effectively remove organic polymeric substances from inorganic substrates and are substantially clear water rinsable.