CONTROL OF CONCENTRATION OF FINE PARTICULATE CONTAMINANT IN DUSTLESS CHAMBER ENVIRONMENT

摘要

A method is disclosed for controlling the concentration of airborne particulate contaminants in a clean room environment. Air under pressure is continually recirculated through the environment and filtered as it is circulating. Mixing of the filtered air is enhanced by imparting turbulence thereto sufficient to render the filtered air substantially homogenous. The particle count of the filtered air is sensed within the environment and the volume of air that is recirculated is controlled according to the sensed particle count to thereby maintain the particle count substantially at a preselectable concentration.