Flying spot scanner for light-microscopic studies in a scanning electron microscope, and operating process

摘要

It is intended that a device should be specified with which a conventional scanning electron microscope can be used in an extended mode. In a flying spot scanner for light-microscopic studies, the electron beam (R) of a scanning electron microscope is directed onto a scintillator (S). In this case, the light (L) emitted by the scintillator (S) is formed into an image on a test point (IC) to be investigated, via an optical system (O). IMAGE