Process and device for storing measuring data from sub-domains of a sputter crater produced and analyzed in a secondary ion mass spectrometer

摘要

A method and a device for storing the measurement data (MS) from a sputter crater (SK), which is generated and analyzed in a secondary ion mass spectrometer, are said to be considerably simpler and cheaper than a method and a device for complete data storage and are nevertheless intended to be essential Show progress over the previously used integral procedure. The area swept by the ion beam of the secondary ion mass spectrometer is divided into a number of partial areas, each of these partial areas is assigned a location in a memory (LA), while the sputter crater (SK) is scanned with the ion beam, the signal components originating from the individual partial areas become (MS) are stored in this memory (LA) at the location assigned to the respective partial area and, after at least one scanning of the sputter crater (SK), the measurement data (MS) are evaluated.